11835 - Field-Emission Scanning Electron Microscope (FE-SEM)

Omschrijving van de opdrachtgever

The Department of Imaging Physics at TU Delft, Faculty of Applied Sciences, has available funding of €1,000,000.—incl. VAT through the Dutch Research Council (NWO) Knowledge and Innovation Covenant (KIC) consortium “Foundations for Electron-Beam Metrology and Inspection” for the acquisition of advanced electron microscopy instrumentation. The intended purchase is a high-end field-emission scanning electron microscope (FE-SEM) to support coherent diffractive imaging in both transmission and reflection geometries. The instrument must meet the following critical performance criteria: • High temporal and spatial coherence at accelerations voltages up to 30 keV and probe currents of 25–100 pA. • Compatibility with bulk samples exceeding 70 × 70 mm, with multiple secondary and back-scattered electron detectors in reflection mode. • Stable stage and flexible chamber design to accommodate custom detectors and electro-optical components in reflection mode. • Support for direct-electron detectors in transmission (preferably retractable), with sufficient resolution inside the bright-field disk to enable diffractive imaging algorithms. This requires a large camera length and convergence angles exceeding 10 mrad at 30 keV. The subject of this tender includes: • All components, requirements, and requested specifications. • Production; • Packaging; • Freight and shipping (DPP Incoterms 2020); • Installation; • Site acceptance test and test reports; • User manual and documentation; • Staff training